Company Story
1995 - Axcelis Technologies, Inc. was founded as a subsidiary of Eaton Corporation.
1999 - The company was spun off from Eaton Corporation and became an independent company.
2000 - Axcelis Technologies, Inc. went public with an initial public offering (IPO).
2001 - The company acquired the semiconductor equipment business of Eaton Corporation.
2004 - Axcelis Technologies, Inc. acquired the assets of SEN Corporation, a Japanese semiconductor equipment company.
2007 - The company acquired the assets of Asyst Technologies, Inc., a provider of semiconductor equipment and services.
2012 - Axcelis Technologies, Inc. acquired the assets of Solomat, a provider of semiconductor equipment and services.
2019 - The company acquired the assets of EV Group, a provider of semiconductor equipment and services.