Company Story
1993 - KLA Instruments was founded by Stanley T. Ogi and Robert E. Swasey
1997 - KLA Instruments acquired several companies, including Therma-Wave, Inc., and Optical Associates, Inc.
2000 - KLA Instruments merged with Tencor, Inc. to form KLA-Tencor Corporation
2001 - KLA-Tencor Corporation acquired the metrology and inspection business of Hitachi High-Technologies Corporation
2007 - KLA-Tencor Corporation launched its first extreme ultraviolet (EUV) lithography reticle inspection system
2010 - KLA-Tencor Corporation acquired the Process Control and Metrology business of Vistec Technology GmbH
2012 - KLA-Tencor Corporation launched its WaferGuard 3D inspection system
2015 - KLA-Tencor Corporation acquired the metrology business of Carl Zeiss SMT GmbH
2019 - KLA-Tencor Corporation changed its name to KLA Corporation
2020 - KLA Corporation acquired the portfolio of process control and metrology products from the Hermes Microvision, Inc.